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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12754486 B1

PDFFull Text
Date of Patent:
Oct. 06, 2026

Filed:

Dec. 18, 2024

Screw transmission drive, and reticle stage and measuring device for semiconductor lithography applications

Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Stephan Zschäck, Weissendorf, DE;

Alexander Heidenreich, Jena, DE;

Ullrich Klarner, Jena, DE;

Steffen Weissenberg, Rackwitz, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:

Fish & Richardson P.C.

Primary Examiner:

Hung V Nguyen

Int. Cl.
CPC ...
G03F 7/00 (2006.01); F16F 15/04 (2006.01); F16H 25/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70758 (2013.01); F16F 15/04 (2013.01); F16H 25/20 (2013.01); G03F 7/70716 (2013.01); G03F 7/7095 (2013.01); F16H 2025/2075 (2013.01);
Abstract

The invention relates to a screw transmission drive, in particular for the reticle stage of a device for lithography applications, comprising a leadscrew, which has a power transmission thread and a leadscrew nut which interacts with the power transmission thread, and a controllable drive for rotating the leadscrew, wherein the leadscrew nut is connected to a leadscrew flange for connection to a component to be moved relative to the drive; the leadscrew flange has two connection elements for connecting, respectively, to the leadscrew nut and to the component to be moved, the connection elements being connected by six elastically deformable struts of identical length which are fixedly clamped at both ends; the clamping points of the struts at the connection elements are distributed, in two parallel connection planes, in pairs at regular intervals over respective connection circles such that each pair of mutually adjacent struts includes an angle; the ratio of the radii of the two connection circles is 0.5, and the connection circles are coaxially located on a common longitudinal axis. The invention also relates to a reticle stage and to a device having a reticle stage, the reticle stage having a screw transmission drive according to the invention.

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Zschäck, Stephan. (2026). Screw transmission drive, and reticle stage and measuring device for semiconductor lithography applications (U.S. Patent No. 12754486). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12754486

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