The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Nov. 22, 2024
Kla Corporation, Milpitas, CA (US);
Alon Rosenthal, Weston, CT (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Collected light may be split into fields using grazing incidence mirrors to avoid illuminating gaps between the active areas for readout electronics. The grazing incidence mirrors may reduce lost field space in the integrating direction by splitting the imaging field in that direction to allow the readout electronics to be outside of the field. The fields may be split so there is space for readout circuits but no associated light on the readout circuits. The size of the illumination may then be decreased and/or the number and/or size of sensors increased to improve the photon collection efficiency. The better photon collection efficiency may reduce shot noise and/or improves tool throughput.