The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Feb. 29, 2024
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/28 (2006.01);
U.S. Cl.
CPC ...
G01N 1/2813 (2013.01);
Abstract
Embodiments of the present disclosure enable identification, labeling, and isolation of a specific layer within a complex, three-dimensional structure such as a semiconductor memory structure. In particular, the systems and methods described herein can identify a specific layer such as a wordline in a multi-layer structure having periodic or repeated layers for subsequent isolation and analysis. The present disclosure enables automation of layer counting and marking within the multi-layer structure such that a specific desired layer within the multi-layer structure can be isolated and analyzed.