The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Sep. 13, 2024
Kla Corporation, Milpitas, CA (US);
Hongbo Si, Ann Arbor, MI (US);
Tara Chan, Ann Arbor, MI (US);
Christopher Tourek, Ann Arbor, MI (US);
John Szilagyi, Dexter, MI (US);
Jaejung Kim, Seoul, KR;
Alberto Daniel Aguilar, Newburgh, IN (US);
Sergio Alejandro Perez, Powder Springs, GA (US);
Qiyue MA, Atlanta, GA (US);
Yohanes Tezera, Clarkston, GA (US);
Marco Antonio Marquez, Cartersville, GA (US);
Jennifer Carol Wolfe, Flat Rock, NC (US);
Luke Dague, Hyndman, PA (US);
Denzel Carter, Naples, FL (US);
Adriano Alessandro Bayz, Washington, DC (US);
Claire Elizabeth Mackes, Crofton, MD (US);
Stacy Marie Ross, Cropwell, AL (US);
KLA CORPORATION, Milpitas, CA (US);
Abstract
A cleaning device for an optical table includes a manifold defining a fluid and vacuum passage, and a nozzle assembly fluidly coupled to the fluid passage. The nozzle assembly includes a nozzle that engages at least one hole formed in the optical table. A vacuum assembly is fluidly coupled to the vacuum passage via a vacuum outlet, and generates a vacuum within the at least one hole formed in the optical table. A fluid inlet is fluidly coupled to the fluid passage, and provides a cleaning fluid to the nozzle. A plurality of alignment rods extend from a manifold distal end of the manifold and engage with a surface of the optical table. The fluid inlet provides the cleaning fluid to the nozzle of the nozzle assembly and the vacuum outlet generates the vacuum within the at least one of hole formed in the optical table simultaneously.