The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Nov. 02, 2021
Tokyo Electron Limited, Tokyo, JP;
Kenichirou Matsuyama, Kumamoto, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate processing apparatus includes a carrier block that disposes a carrier; a processing block including a processing module that processes a substrate; a carry-in port and a carry-out port; a substrate discharge port and a substrate reception port provided in the carrier block and mounts the carrier thereon; a first temporary carrier mount stage and a second temporary carrier mount stage that temporarily mount the carrier thereon; a carrier transfer mechanism that transfers the carrier among the carry-in port, the carry-out port, the substrate reception port, the substrate discharge port, the first temporary carrier mount stage, and the second temporary carrier mount stage; and a controller that compares a transfer time via the first temporary carrier mount stage and a transfer time via the second temporary carrier mount stage, and output a control signal for controlling an operation of the carrier transfer mechanism.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile