The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2026

Filed:

Mar. 07, 2023
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Ryota Aoi, Hokkaido, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/418 (2006.01); G05B 23/02 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4183 (2013.01); G05B 23/0272 (2013.01); G05B 2219/2602 (2013.01);
Abstract

A state management system includes an acquisition unit configured to acquire cumulative data, an execution unit configured to execute, in each cycle, a processing of calculating a specific index indicating a state of the apparatus using a plurality of types of data among the acquired data, and a display control unit configured to display time-series data indicating a time-series change in the calculated specific index. The processing executed by the execution unit includes at least one of calculating a first index indicating a degree of normality of the apparatus, calculating a second index indicating a rate at which the apparatus was in the operable state, and calculating a third index indicating productivity of the apparatus. The display control unit displays the time-series data having the first index, the second index, and/or the third index as the specific index.


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