The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Jul. 02, 2024
Applied Materials Israel Ltd., Rehovot, IL;
Menachem Lapid, Rehovot, IL;
Itay Langstadter, Rehovot, IL;
Roy Kaner, Rehovot, IL;
Roman Naidis, Rehovot, IL;
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
An auto-focus system that includes (i) an illumination path that is configured to illuminate a sample with illumination beams that form multiple spot arrays on the sample that comprises an upstream set of spot arrays formed on a first side of an imaging area, and a downstream set of spot arrays formed on another side of the imaging area; (ii) a collection path that comprises an entrance pupil and is configured to collect collected beams that are emitted from the sample, and focus the collected beams along a first axis while imaging the entrance pupil along a second axis to provide optically processed beams. The sensor is configured to generate detection signals that represent the optically processed beams. The controller is configured to determine a focus state of an evaluation beam that impinges on imaging area.