The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
Apr. 17, 2023
Applicant:
Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;
Inventors:
Yuan-Cheng Kuo, Kaohsiung City, TW;
Chi-Chung Jen, Kaohsiung City, TW;
Kai-Hung Hsiao, Kaohsiung City, TW;
Pei-Huang Hsu, Tainan City, TW;
Chih-Hsiung Huang, Hsinchu County, TW;
Assignee:
Taiwan Seimconductor Manufacturing Company Limited, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01); H10P 72/10 (2026.01); H10P 72/30 (2026.01);
U.S. Cl.
CPC ...
H10P 72/1928 (2026.01); H10P 72/3404 (2026.01);
Abstract
A wafer storage device is provided. The wafer storage device includes a floor, a ceiling, and one or more walls between the floor and the ceiling to define a wafer storage chamber for storage of one or more wafers. The apparatus includes a particle-attraction object, having a positive charge or a negative charge, in the wafer storage chamber and configured to attract particles in the wafer storage chamber.