The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
Mar. 31, 2022
Intel Corporation, Santa Clara, CA (US);
Shaun Mills, Hillsboro, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Embodiments described herein may be related to apparatuses, processes, and techniques directed to creating backside routing layer in a transistor, and in particular to creating contacts with different depths in the backside routing layer in order to provide more precise connections with backside metal layers (BM0) that may be on an opposite side of a wafer. Existing openings, or holes, within a front side transistor structure that include the epitaxial layers may be used to create self-aligned contacts that extend below the epitaxial layer and into the wafer to contact BM0. Other embodiments may be described and/or claimed.