The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
May. 31, 2024
Tokyo Electron Limited, Tokyo, JP;
Toyohisa Tsuruda, Koshi City, JP;
Masato Hosaka, Fuchu City, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An apparatus includes: an acquisitor for acquiring a processed image including information about a surface of a processed substrate after a process of a target film; an estimator for estimating a shape characteristic value of the target film, by applying, to the processed image, an estimation model associated with a correlation between information about a color of the substrate included in the processed image and the shape characteristic value; a creator for creating an unprocessed-substrate influence model associated with a correlation between a difference between an estimation result of the shape characteristic value by the estimator and a shape characteristic value of the target film acquired without using the estimation model, and information about a color of an unprocessed substrate before the process of the target film, and a corrector for correcting the estimation result of the shape characteristic value based on the unprocessed-substrate influence model.