The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2026

Filed:

Sep. 30, 2021
Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Tomotada Hirohara, Toyama, JP;

Shou Shimizu, Toyama, JP;

Mamoru Tamura, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); C08G 59/14 (2006.01); C08G 65/329 (2006.01); C09D 171/00 (2006.01); G03F 7/16 (2006.01); H10P 76/20 (2026.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08G 59/1483 (2013.01); C08G 65/329 (2013.01); C09D 171/00 (2013.01); H10P 76/2041 (2026.01); G03F 7/168 (2013.01);
Abstract

A composition for forming a resist underlayer film and a method for producing a resist pattern, the method using the composition for forming a resist underlayer film; and a method for producing a semiconductor device. A resist underlayer film-forming composition which contains an organic solvent and a polymer that has an end blocked with a compound (A), wherein: the polymer is derived from compound (B) that is represented by formula (11). (In formula (11), Y1 represents a single bond, an oxygen atom, a sulfur atom, an alkylene group having from 1 to 10 carbon atoms, the alkylene group being optionally substituted by a halogen atom or an aryl group having from 6 to 40 carbon atoms, or a sulfonyl group; each of T1 and T2 represents an alkyl group having from 1 to 10 carbon atoms; and each of n1 and n2 independently represents an integer from 0 to 4).


Find Patent Forward Citations

Loading…