The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
Jun. 14, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Yuxing Zhang, Santa Clara, CA (US);
Tuan Anh Nguyen, San Jose, CA (US);
Amit Kumar Bansal, Milpitas, CA (US);
Nitin Pathak, Mumbai, IN;
Saket Rathi, Santa Clara, CA (US);
Thomas Rubio, Santa Clara, CA (US);
Udit S. Kotagi, Singapore, SG;
Badri N. Ramamurthi, Los Gatos, CA (US);
Dharma Ratnam Srichurnam, Bengaluru, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present disclosure relates to cleaning assemblies, components thereof, and methods associated therewith for substrate processing chambers. In one example, a method includes positioning a pedestal disposed in a substrate processing chamber in a first vertical position for a first time period, directing cleaning fluid into the internal volume of the substrate processing chamber located above the faceplate, diverting a portion of the cleaning fluid to the distribution ring and into the internal volume located below the faceplate by opening up the isolation valve, and positioning the pedestal in one or more additional vertical positions while the isolation valve is opened, the one or more additional vertical positions being different than the first vertical position.