The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Aug. 16, 2022
Applicant:
Sumitomo Electric Device Innovations, Inc., Kanagawa, JP;
Inventor:
Kohei Miyashita, Kanagawa, JP;
Assignee:
SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC., Kanagawa, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10P 14/20 (2026.01);
U.S. Cl.
CPC ...
H10P 14/3216 (2026.01); H10P 14/3416 (2026.01);
Abstract
A method of manufacturing a semiconductor device includes forming a first AlN layer on a first main surface of a single-crystal substrate, partly etching the first AlN layer to form a plurality of pieces of AlN seed crystals on the first main surface from the first AlN layer, and forming a second AlN layer on the first main surface using the AlN seed crystals as growth nuclei.