The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2026

Filed:

Nov. 22, 2022
Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventor:

Ferry Zijp, Veldhoven, NL;

Assignee:

ASML NETHERLANDS B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/20 (2006.01); H01J 61/16 (2006.01); H01J 61/30 (2006.01); H01J 61/33 (2006.01); H05G 2/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70233 (2013.01); G03F 7/2004 (2013.01); G03F 7/70033 (2013.01); G03F 7/706847 (2023.05); G03F 7/706849 (2023.05); H01J 61/16 (2013.01); H01J 61/302 (2013.01); H01J 61/33 (2013.01); H05G 2/0086 (2024.08);
Abstract

An optical assembly includes a bulb and a lens for a laser-operated light source. The bulb has a chamber for accommodating an ionizable gas and a plasma formed by energizing the ionizable gas and has a longitudinal axis and a transverse axis perpendicular to the longitudinal axis. In use, the lens is arranged to focus a wavefront of radiation from a laser to a virtual object point located inside the chamber. In use, the bulb is arranged to transmit and refract the wavefront of the radiation to a first real image point in a first cross-section of the longitudinal axis and a second real image point in a second cross-section of the transverse axis. The first real image point and the second real image point are image conjugates of the virtual object point. The virtual object point, the first real image point and the second real image point coincide.


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