The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Nov. 06, 2024
Semilab Semiconductor Physics Laboratory Co., Ltd., Budapest, HU;
Attila Márton, Budapest, HU;
SEMILAB SEMICONDUCTOR PHYSICS LABORATORY CO., LTD., Budapest, HU;
Abstract
An semiconductor wafer measurement apparatus includes a holder; a probe with a capillary tube containing a mercury column for contacting a wafer with the column; a pneumatic control means applying a partial vacuum or pressure above the column; a probe arm affixed to the probe; a positioning means controlling the position of the tube relative to the wafer; a measurement means causing a current through the wafer and for measuring electrical properties of the wafer; a first electrical contact connected to the column; a second electrical contact connected to the holder; a mercury container; and a control unit in communication with the pneumatic control means, the positioning means and the measurement means. The probe has a measurement position and a mercury change position. The tube is separated from the mercury container in the measurement position, and the tube is in fluid communication with the mercury container in the change position.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile