The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
May. 06, 2022
Inficon, Inc., East Syracuse, NY (US);
Chunhua Song, Jamesville, NY (US);
Mohamed B. Rinzan, Manlius, NY (US);
Steve James Lakeman, Newbury Park, CA (US);
Lukas Baumgartel, Portland, OR (US);
Matan Lapidot, Kibbutz Kfar, IL;
Brian O'neill, Lewis Center, OH (US);
INFICON, INC., East Syracuse, NY (US);
Abstract
A system and method for determining the changes in resonance frequency in crystal microbalance (CM) sensors and the resulting changes in the determination of incremental mass on the CM sensors caused by temperature. Dual mode resonances and coefficients are used in a deconvolution process to determine and extract the frequency shift caused by temperature to provide the temperature compensated incremental mass (ΔM). In one embodiment, dual mode analysis is provided using a mass mode (e.g., the c-mode fundamental frequency (f)) and a temperature mode (e.g., the anharmonic frequency (f)) and associated coefficients. In other embodiments that are more sensitive to temperature changes, dual mode analysis is provided using the b-mode fundamental frequency (f) as the temperature-mode and associated coefficients.