The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Aug. 04, 2023
Veeco Instruments Inc., Plainview, NY (US);
Aniruddha Bagchi, Princeton, NJ (US);
Sandeep Krishnan, Princeton Junction, NJ (US);
Eric Armour, Pennington, NJ (US);
Michael Chansky, Hillsborough, NJ (US);
Yuliy Rashkovsky, Milburn, NJ (US);
Andrew Hanser, Delray Beach, FL (US);
Matthew Van Doren, Roxbury, CT (US);
William Wangard, III, Dover, NH (US);
Veeco Instruments Inc., Plainview, NY (US);
Abstract
A wafer carrier includes a base including a generally planar bottom surface and a top surface that includes a plurality of platforms extending above the top surface. The wafer carrier includes a thermal cover defining a plurality of pockets. The thermal cover is configured to be coupled to the base by at least one fastener and the plurality of pockets are arranged such that each pocket of the plurality of pockets is aligned with a corresponding platform of the plurality of the platforms when the thermal cover is supported by a plurality of first pedestals that extend from the top surface of the base. A plurality of second pedestals are located along the plurality of platforms for supporting the one or more wafers, wherein each platform includes at least one second pedestal that extends from a top surface of the platform for supporting one wafer.