The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Oct. 24, 2023
Tokyo Electron Limited, Tokyo, JP;
Norman Jacobson, Albany, NY (US);
Ronald Nasman, Albany, NY (US);
Kandabara Tapily, Mechanicsville, NY (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
Aspects of the present disclosure provide an apparatus, which includes first gas channels distributing a first process gas and second gas channels alternating with the first gas channels and distributing a second process gas. The apparatus further includes first feed tubes each including first outlets configured to deliver the first process gas to a row of the first gas channels via the first outlets along different first flow paths of a same first length, and second feed tubes each including second outlets corresponding to a row of the second gas channels and configured to deliver the second process gas to the row of the second gas channels via the second outlets along different second flow paths of a same second length. The apparatus further includes vertical gas conduits each vertically extending from a respective one of the array of gas channels configured to transmit the first or second process gas.