The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Nov. 13, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Vijay D. Parkhe, San Jose, CA (US);
Kevin Richard Verrier, Hampton, NH (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H10P 72/72 (2026.01);
U.S. Cl.
CPC ...
H10P 72/722 (2026.01);
Abstract
An electrostatic clamp system may include a conductive base; a ceramic body, having an inner side that is attached to the conductive base, and an outer side to face a substrate, the ceramic body including an electrode assembly; and a charge control assembly, the charge control assembly defining an electrically conductive structure that is isolated from the electrode assembly and extends through the conductive base to an upper surface of the outer side of the ceramic body.