Substrate processing system and substrate transfer method

Abstract

There is provided a substrate processing system comprising: a plurality of modules including a processing chamber in which a substrate is held and processing is performed on the substrate; a transfer chamber to which the plurality of modules are connected; a substrate transfer device provided inside the transfer chamber, for transferring the substrate to the plurality of modules and taking out the substrate from the plurality of modules; and a controller. The substrate transfer device includes a first transfer unit and a second transfer unit, each of which places thereon the substrate and is linearly movable and swivelable independently and freely over a surface of the transfer chamber, and the controller controls the substrate transfer device such that a substrate replacement operation is performed from one module to another module among the plurality of modules by moving the first transfer unit and the second transfer unit concurrently in parallel.