The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Mar. 04, 2024
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Lutz Brekerbohm, Hardegsen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04N 23/52 (2023.01); G03B 17/55 (2021.01); H04N 23/54 (2023.01); H10F 39/00 (2025.01); H10W 40/28 (2026.01);
U.S. Cl.
CPC ...
H04N 23/52 (2023.01); H04N 23/54 (2023.01); H10F 39/804 (2025.01); H10W 40/28 (2026.01); G03B 17/55 (2013.01);
Abstract
The invention relates to a Peltier module, to an assembly and to an apparatus for mask inspection. A Peltier module according to the invention has a plurality of Peltier pellets, which are made of a semiconductor material and are arranged between a first plate forming a hot side and a second plate forming a cold side, wherein the first plate and the second plate are each made of a metallic material, and wherein a vacuum seal component is provided on the second plate.