The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2026

Filed:

Sep. 05, 2023
Applicant:

Nuflare Technology, Inc., Yokohama, JP;

Inventors:

Yasutaka Sato, Hachioji, JP;

Hironori Mizoguchi, Yokohama, JP;

Toru Hinata, Yokohama, JP;

Toshiki Kimura, Yokohama, JP;

Kiminobu Akeno, Yokohama, JP;

Assignee:

NuFlare Technology, Inc., Yokohama, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); H01J 37/09 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/09 (2013.01); H01J 37/3174 (2013.01); H01J 2237/0451 (2013.01); H01J 2237/1501 (2013.01); H01J 2237/24564 (2013.01);
Abstract

In one embodiment, a beam detector includes a first aperture plate including a first passage hole, a second aperture plate including a second passage hole that allows a single detection target beam passing through the first passage hole to pass therethrough, and a sensor detecting a beam current of the detection target beam passing through the second passage hole. The second aperture plate includes an electrically conductive material, a plurality of third passage holes are formed around the second passage hole, and the plurality of third passage holes allow light to pass therethrough.


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