The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Apr. 05, 2024
Carl Zeiss Microscopy Gmbh, Jena, DE;
Heiko Stegmann, Dresden, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
The disclosure relates to a sample holder for holding a microsample during backside thinning, and to a backside thinning method. The sample holder is mountable on a sample stage and comprises a base plate, an intermediate piece and a receiving device. The base plate has a base face. The intermediate piece is rotatably arranged on the base plate and is rotatable about a first axis of rotation R, which is aligned relative to the base face at an angle of 45°. The receiving device is also rotatably connected to the intermediate piece. The first receiving is being rotatable relative to the intermediate piece about a second axis of rotation R. The second axis of rotation Ris aligned relative to the base face at an angle of (90+x)°, with x taking a value of 0 to 20.