The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Dec. 07, 2021
Applicant:
Mi2-factory Gmbh, Jena, DE;
Inventors:
Assignee:
mi2-factory GMBH, Jena, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 37/147 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/05 (2013.01); H01J 37/1474 (2013.01); H01J 37/3171 (2013.01); H01J 2237/057 (2013.01);
Abstract
An energy filter assembly () for ion implantation system is provided comprising an energy filter (), a first filter frame (), and at least one coupling element (). The energy filter () has at least one filter element () absorbing the beam energy of an ion beam (). The at least one coupling element () elastically connects the first filter frame () with the energy filter ().