The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Dec. 13, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Paul Van Dongen, Wilton, CT (US);
Aart Adrianus Van Beuzekom, Eindhoven, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H10P 72/76 (2026.01); H10P 72/78 (2026.01);
U.S. Cl.
CPC ...
G03F 7/7075 (2013.01); G03F 7/70341 (2013.01); G03F 7/70916 (2013.01); H10P 72/7602 (2026.01); H10P 72/78 (2026.01);
Abstract
A gripper configured to transport a substrate in a lithographic apparatus, the gripper including: a main body with one or more engagement portions for engaging with a surface of the substrate, wherein a part of the main body, that is overlapped by a region of a substrate when the one or more engagement portions are engaged with the substrate, has a plurality of openings that extend through the main body in a direction substantially perpendicular to the surface of the substrate.