The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2026

Filed:

Oct. 13, 2023
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

M. Arif Zeeshan, Manchester-by-the-Sea, MA (US);

Kelvin Chan, San Ramon, CA (US);

Shantanu Kallakuri, Ithaca, NY (US);

Sony Varghese, Manchester-by-the-Sea, MA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/04 (2006.01); C23C 16/02 (2006.01); H10B 12/00 (2023.01); C23C 14/22 (2006.01); C23C 16/455 (2006.01); H10P 14/43 (2026.01);
U.S. Cl.
CPC ...
C23C 16/047 (2013.01); C23C 16/0281 (2013.01); H10B 12/485 (2023.02); C23C 14/221 (2013.01); C23C 14/225 (2013.01); C23C 16/0209 (2013.01); C23C 16/45525 (2013.01); H10P 14/432 (2026.01);
Abstract

An electronic device including an active device region, disposed at least partially in a first level, the active device region comprising an array of active device features, an array of device structures, disposed in a second level, above the first level, and a contact level, comprising an array of staggered contacts, wherein the array of staggered contacts electrically connect the array of active device features to the array of device structures, and wherein the array of staggered contacts are characterized by an S-shaped cross-section.


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