The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Oct. 07, 2022
Ebara Corporation, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A substrate is reliably suctioned regardless of a flatness of a surface to be suctioned of the substrate. A substrate suction memberincludes a porous memberincluding a substrate suction surfacefor suctioning a substrate WF and a pressure reducercommunicating with pressure reducing means, a shielding memberincluding a first shielding member-configured to shield a surfacein an opposite side of the substrate suction surfaceof the porous memberand a frame-shaped second shielding member-configured to shield at least a part of a side surfaceof the porous member, and a frame-shaped elastic seal memberattached to the second shielding member-so as to surround the porous memberand provided with a contact surfacein contact with the substrate WF.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile