The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Sep. 08, 2023
Applicant:
Asm Ip Holding, B.v., Almere, NL;
Inventors:
Daniele Piumi, Etterbeek, BE;
Ivo Raaijmakers, Amersfoort, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 76/40 (2026.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H10P 76/4085 (2026.01); H10P 72/0421 (2026.01); H10P 72/0468 (2026.01); H10P 76/4088 (2026.01); H10P 76/405 (2026.01);
Abstract
Methods for patterning and forming structures, as well as related structures and systems are disclosed. The methods comprise forming a mandrel on a substrate. Forming the mandrel comprises executing a plurality of etching cycles to thin a structure.