The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Dec. 18, 2023
Applicant:
Coorstek Kk, Tokyo, JP;
Inventor:
Manami Sugiyama, Kariya City, JP;
Assignee:
CoorsTek KK, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H01J 37/32477 (2013.01); H01J 37/32807 (2013.01); H10P 72/0421 (2026.01); H01J 2237/3341 (2013.01);
Abstract
A ceramic sintered body for semiconductor production equipment and a manufacturing method thereof capable of giving a high-density oxyfluoride ceramic sintered body without any peculiar circumstances. The ceramic sintered body for semiconductor production equipment of the present invention has a main phase of an oxyfluoride with a polycrystalline structure having 50% or more of crystals with a grain size of 1 to 5 μm or has a multiple phase of the oxyfluoride and a fluoride; and has an L* value of 20 to 65, an a* value of −1 to 10 and a b* value of −1 to 10 in the L*a*b* color system.