The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Oct. 21, 2021
Applicant:
Hitachi High-tech Analysis Corporation, Tokyo, JP;
Inventor:
Tatsuya Asahata, Tokyo, JP;
Assignee:
HITACHI HIGH-TECH ANALYSIS CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/226 (2013.01); H01J 2237/202 (2013.01); H01J 2237/24578 (2013.01);
Abstract
This sample piece relocating device () includes an optical interferometry device (), a sample piece carrying device (), and a control device (). The control device () controls the sample piece carrying device () based on information relating to processing in which a charged-particle beam device is used to irradiate a sample (S) with a charged-particle beam, thereby preparing a sample piece. The sample piece carrying device () controlled by the control device () separates and extracts the sample piece from the sample (S) and holds and carries the sample piece to a sample piece holder.