The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
May. 02, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Adam M. Mclaughlin, Merrimac, MA (US);
Diana C. Gronski, Salisbury, MA (US);
Craig R. Chaney, Gloucester, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A faceplate and fasteners for attaching the faceplate to an ion source are disclosed. The faceplate includes a plurality of channels that open to the side of the faceplate. These channels are an elongated shape such that the channels are larger in one direction than in the orthogonal direction. The channels each terminate in an internal cavity, which has a larger size than the channels. The fasteners may be rods that are shaped such that the proximal ends of the fastener have a bent portion, which can only enter the channel when properly oriented. Once the bent portion is passed through the channel and extends into the internal cavity, the fastener can be rotated so as to secure it in place.