The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2026

Filed:

Feb. 09, 2023
Applicant:

Stmicroelectronics International N.v., Geneva, CH;

Inventors:

Domenico Giusti, Caponago, IT;

Marco Ferrera, Concoerezzo, IT;

Fabio Quaglia, Pizzale, IT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01S 15/89 (2006.01); H10N 30/30 (2023.01); B06B 1/06 (2006.01); H10N 30/20 (2023.01);
U.S. Cl.
CPC ...
G01S 15/8927 (2013.01); H10N 30/308 (2023.02); B06B 1/0622 (2013.01); B81B 2203/0315 (2013.01); B81B 2207/092 (2013.01); H10N 30/2047 (2023.02);
Abstract

An array of piezoelectric micromachined ultrasound transducers (PMUTs) includes a substrate having first and second cavities buried therein. A first piezoelectric stack is carried by the substrate and at least partially overlays the first cavity. A second piezoelectric stack is carried by the substrate and at least partially overlays the second cavity. A thickness of the substrate between the second cavity and the second piezoelectric stack forms a membrane. Circuitry operates the second piezoelectric stack so as to vibrate the membrane to generate a pulse of ultrasound and to immediately subsequently operate the first piezoelectric stack to cause deformation of the second cavity which results in an increase in a resonant frequency of the membrane.


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