The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Feb. 02, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Ralph P. Antonio, Santa Clara, CA (US);
Daisuke Tanaka, Los Gatos, CA (US);
Peter Lai, Santa Clara, CA (US);
Kaushik Rao, Santa Clara, CA (US);
Sudhir R. Gondhalekar, Fremont, CA (US);
Paul Emerick, Richmond, CA (US);
Applied Materials Inc., Santa Clara, CA (US);
Abstract
Methods and apparatus for a substrate processing system includes a chamber port assembly configured to connect between respective first and second chambers of a substrate processing system. The chamber port assembly includes a body with openings disposed on opposing sides of the body and a tunnel extending between the openings to facilitate passage of a substrate between the first and second chambers through the tunnel; an inlet port in the body; a manifold in fluid communication with the inlet port and having an outlet in fluid communication with the tunnel; and a sensor port in the body in communication with the tunnel.