The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Oct. 24, 2023
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Makoto Maejima, Tokyo, JP;
Yuto Maeda, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 41/06 (2012.01); B24B 7/04 (2006.01); B24B 7/22 (2006.01); B24B 51/00 (2006.01); H10P 52/00 (2026.01);
U.S. Cl.
CPC ...
B24B 41/068 (2013.01); B24B 7/04 (2013.01); B24B 7/228 (2013.01); H10P 52/00 (2026.01); B24B 51/00 (2013.01);
Abstract
A processing apparatus includes a rotatable turntable and four chuck tables disposed on the turntable. When the turntable with the four chuck tables disposed thereon is intermittently turned about its central axis, the wafer held on each of the chuck tables is moved to and positioned in a first processing position, a second processing position, and a third processing position where the wafer is processed. Three types of processing processes are able to be carried out on the wafers without the wafers being spaced from holding surfaces of the chuck tables.