The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Jul. 10, 2024
Applicant:
Shinko Electric Industries Co., Ltd., Nagano, JP;
Inventors:
Masahiro Sunohara, Nagano, JP;
Tatsuya Nakamura, Nagano, JP;
Assignee:
SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/72 (2026.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H10P 72/72 (2026.01); H01J 37/32724 (2013.01); H01J 2237/334 (2013.01);
Abstract
An electrostatic chuck includes a first base body, a first adhesive layer, a second base body stacked on the first base body with the first adhesive layer interposed therebetween, and an electrostatic electrode embedded in the second base body. The first base body is made of aluminum oxide ceramics. The second base body is made of aluminum oxide ceramics with a higher purity of aluminum oxide than that of the first base body.
Sunohara, Masahiro. (2026). Electrostatic chuck and substrate fixing device (U.S. Patent No. 12721101). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12721101
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile