The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Oct. 24, 2022
Entegris, Inc., Billerica, MA (US);
Matthew A. Fuller, Colorado Springs, CO (US);
Mark V. Smith, Colorado Springs, CO (US);
Shawn D. Eggum, Lonsdale, MN (US);
Thomas H. Wilkie, Colorado Springs, CO (US);
Colton J. Harr, Monument, CO (US);
Michael C. Zabka, New Prague, MN (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
Substrate containers include purge flow distribution systems. The purge flow distribution systems can divide one or more input flows of purge gas to a plurality of gas distribution surfaces of a network of gas distribution devices. Methods of controlling purge can include configuring the substrate containers to provide determined purge gas flow rates at each of the gas distribution surfaces. The configuration can be performed using flow controls of the purge flow distribution systems. The purge gas flow rates can be determined based on purge performance parameters. A controller can direct the operation of the purge flow distribution systems. The controller and the substrate container can be combined in a substrate container purging system.