The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Dec. 30, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Ulrich Mueller, Berkeley, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present disclosure relate to a linear motor system and a digital lithography system having the linear motor system that compensates for potential parasitic forces applied to at least one stage of the digital lithography system during operation. The digital lithography system includes one or more motor coils disposed between an upper plate and a lower plate of a yoke of at least one track. The motor coils are each coupled to a mount which is coupled to a stage. Each mount includes one or more active compensators. During a digital lithography operation, the active compensators are in communication with the controller, The active compensators provides a force in the opposite direction of the parasitic forces, such as vibrations and other disturbances. The compensation of the parasitic forces increases the quality of the patterns printed by the digital lithography system.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile