The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
May. 11, 2020
Applicant:
Asml Holding N.v., Veldhoven, NL;
Inventors:
Matthew Lipson, Stamford, CT (US);
Eric Justin Monkman, Fairfield, CT (US);
Victor Antonio Perez-Falcon, Bridgeport, CT (US);
Assignee:
ASML HOLDING N.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/683 (2006.01); H10P 72/72 (2026.01);
U.S. Cl.
CPC ...
G03F 7/70708 (2013.01); H10P 72/722 (2026.01);
Abstract
An electrostatic clamp and a method for fabricating the same. The electrostatic clamp includes a first stack and a second stack, wherein the first stack is joined with the second stack. Each of the first and second stacks includes a clamp body, one or more electrodes disposed on the clamp body, a dielectric plate disposed on the electrodes, and a plurality of channels inside the clamp body.