The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Nov. 22, 2024
In-situ wafer stress measurement by chromatic confocal sensor scanning with temperature compensation
Orbotech Ltd., Yavne, IL;
Scott Haymore, Newport, GB;
Arkady Bronfman, Beer Sheva, IL;
Tal Goichman, Kiryat Ono, IL;
Tony Wilby, Bristol, GB;
Boaz Rosenberg, Gadera, IL;
Orbotech Ltd., Yavne, IL;
Abstract
A system includes a process chamber, a transport chamber connected to the process chamber, a robot arm that supports a workpiece, a chromatic confocal sensor, a temperature sensor, and a processor. The robot arm is configured to move the workpiece along a movement path between the process chamber and the transport chamber, and as the robot arm moves the workpiece along the movement path, the chromatic confocal sensor is configured to measure a wavelength of light reflected by the workpiece and the temperature sensor is configured to measure a surface temperature of the workpiece. The processor is configured to filter a first scanning signal received from the chromatic confocal sensor to produce a first filtered signal that compensates for temperature variations of the workpiece according to a first temperature signal received from the temperature sensor, and generate a first bow profile of the workpiece based on the first filtered signal.