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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12716416 B1

PDFFull Text
Date of Patent:
Aug. 25, 2026

Filed:

Jan. 03, 2025

Liquid supply device with function of reducing generation of particles

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Kyoungwhan Oh, Suwon-si, KR;

Hokyun Kim, Suwon-si, KR;

Kyung-Won Kang, Suwon-si, KR;

Takashi Sasa, Suwon-si, KR;

Sanghyun Lim, Suwon-si, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Attorney:

Wolf, Greenfield & Sacks, P.C.

Primary Examiner:

Peter J Bertheaud

Int. Cl.
CPC ...
F04D 13/06 (2006.01); F04D 13/02 (2006.01); F04D 15/00 (2006.01); F04D 15/02 (2006.01); F04D 29/048 (2006.01); F04D 29/18 (2006.01); F04D 29/42 (2006.01);
U.S. Cl.
CPC ...
F04D 13/06 (2013.01); F04D 13/024 (2013.01); F04D 13/027 (2013.01); F04D 13/0606 (2013.01); F04D 13/0633 (2013.01); F04D 13/064 (2013.01); F04D 13/0666 (2013.01); F04D 29/048 (2013.01); F04D 29/186 (2013.01); F04D 29/426 (2013.01); F04D 15/0066 (2013.01); F04D 15/0245 (2013.01);
Abstract

A liquid supply device that reduces particle generation includes a pump configured to supply a liquid to a nozzle within a wafer processing chamber, a controller configured to control the pump, and a main power source configured to supply electrical power to the pump. The pump includes a stator, a coil surrounding the stator, a case having an internal space, and an impeller within the case internal space. The impeller is rotated by a magnetic force generated by the stator and the coil. When the electrical power is shut off from the main power source to the coil, the controller is configured to reduce a rotational speed of the impeller and stop the pump.

Find Patent Forward Citations

Oh, Kyoungwhan. (2026). Liquid supply device with function of reducing generation of particles (U.S. Patent No. 12716416). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12716416

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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