The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2026

Filed:

Jun. 01, 2022
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Changhoon Jeon, Goyang-si, KR;

Jaeeun Jang, Daegu, KR;

Sujin Heo, Pohang-si, KR;

Sohee Kim, Daegu, KR;

Hyunwoo Jang, Daegu, KR;

Gisoon Choi, Daejeon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01); H01J 21/10 (2006.01);
U.S. Cl.
CPC ...
C23C 14/24 (2013.01); H01J 21/10 (2013.01);
Abstract

A method of manufacturing a vacuum tunneling device, the method including forming a tunnelling device on a substrate; forming an insulating interlayer on the substrate such that the insulating interlayer has an opening exposing the tunneling device; and performing a gradient deposition process in a vacuum chamber to form a sealing layer on the insulating interlayer such that the sealing layer fills an upper portion of the opening.


Find Patent Forward Citations

Jeon, Changhoon. (2026). Vacuum tunneling device and method of manufacturing the same (U.S. Patent No. 12716124). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12716124

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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