The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2026
Filed:
Dec. 27, 2022
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Juline Shoeb, Fremont, CA (US);
Alexander Miller Paterson, San Jose, CA (US);
Assignee:
LAM RESEARCH CORPORATION, FREMONT, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
U.S. Cl.
CPC ...
H01J 37/32091 ; H01J 37/32165 ; H01J 37/32568 ; H10P 72/722 ; H01J 37/321 ; H01J 37/32706 ; H01J 37/32715 ;
Shoeb, Juline. (2026). Systems for controlling plasma density distribution profiles including multi-rf zoned substrate supports (U.S. Patent No. 12712159). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12712159
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile