The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Apr. 30, 2024
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Chenfei Hu, Milpitas, CA (US);
Chao Liu, San Jose, CA (US);
Chien-Min Liao, San Jose, CA (US);
Marc David Shull, Los Gatos, CA (US);
Michael Kutney, Santa Cruz, CA (US);
Thomas K. Cho, Los Altos, CA (US);
Christopher Laurent Beaudry, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
H10P 72/7624 (2026.01); H10P 72/7616 (2026.01);
Abstract
Embodiments described herein relate to substrate holder systems. An apparatus includes a substrate holder having a surface to receive a substrate. The surface has a texture that causes an optical beam incident on the surface to scatter in at least one direction away from an optical detector to be located above the substrate holder.