The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Dec. 10, 2019
Applicant:
Showa Denko K.k., Tokyo, JP;
Inventors:
Yosuke Tanimoto, Tokyo, JP;
Shimon Osada, Tokyo, JP;
Assignee:
Resonac Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 5/00 (2006.01); B08B 7/00 (2006.01); C23C 8/08 (2006.01); H01J 37/32 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32853 (2013.01); B08B 5/00 (2013.01); B08B 7/00 (2013.01); C23C 8/08 (2013.01); C23C 16/4405 (2013.01);
Abstract
Provided are an adhesion removal method capable of removing sulfur-containing adhesions that adhere onto the inner surface of a chamber or the inner surface of a pipe connected to the chamber without disassembly of the chamber and a film-forming method. Sulfur-containing adhesions adhering onto at least one of the inner surface of a chamber () and the inner surface of a discharge pipe () connected to the chamber () are removed by reaction with a cleaning gas containing a fluorine-containing compound gas.