The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Feb. 17, 2022
Asml Netherlands B.v., Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An unknown defect type cannot be identified or classified by existing defect classification techniques. An improved defect classification method includes obtaining an inspection image of a wafer resulting from a lithography process, obtaining layout data associated with the inspection image, obtaining a probability map derived from the layout data, wherein the probability map identifies a probability of a first defect type resulting from the lithography manufacturing process occurring in a region of the layout data, identifying a potential defect in the inspection image occurring at a first location, evaluating a confidence score for the potential defect, based on a threshold corresponding to a known defect type, indicating the potential defect as an unknown defect type if the confidence score does not satisfy the threshold, and classifying the unknown defect type based on the probability map and the first location.