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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12704778 B1

PDFFull Text
Date of Patent:
Aug. 11, 2026

Filed:

May. 31, 2019

Resist underlayer compositions and pattern formation methods using such compositions

Applicant:

Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);

Inventors:

Li Cui, Westborough, MA (US);

Shintaro Yamada, Shrewsbury, MA (US);

Iou-Sheng Ke, Andover, MA (US);

Paul J. Labeaume, Auburn, MA (US);

Suzanne M. Coley, Mansfield, MA (US);

James F. Cameron, Brookline, MA (US);

Keren Zhang, Shrewsbury, MA (US);

Joshua Kaitz, Watertown, MA (US);

Assignee:

DUPONT ELECTRONIC MATERIALS INTERNATIONAL, LLC, Marlborough, MA (US);

Attorney:

CANTOR COLBURN LLP

Primary Examiner:

Mark F Huff

Assistant Examiner:

Richard David Champion

Int. Cl.
CPC ...
G03F 7/11 (2006.01); C08K 3/04 (2006.01); C08L 25/06 (2006.01); C08L 61/06 (2006.01); G03F 7/00 (2006.01); G03F 7/09 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0035 (2013.01); C08K 3/045 (2017.05); C08L 25/06 (2013.01); C08L 61/06 (2013.01); G03F 7/094 (2013.01); G03F 7/16 (2013.01); G03F 7/11 (2013.01);
Abstract

A resist underlayer composition including a polymer having a polymer backbone and a substituted or unsubstituted fullerene group pendant to the polymer backbone, and a solvent in an amount of from 50 to 99.9 weight % based on the total resist underlayer composition.

Find Patent Forward Citations

Cui, Li. (2026). Resist underlayer compositions and pattern formation methods using such compositions (U.S. Patent No. 12704778). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12704778

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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