The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Nov. 16, 2023
Keithley Instruments, Llc, Solon, OH (US);
Jin Kwang Yu, Hudson, OH (US);
Alexander N. Pronin, Twinsburg, OH (US);
Kethley Instruments, LLC, Solon, OH (US);
Abstract
Methods and systems of testing microelectromechanical (MEMS) devices are disclosed. A method includes mechanically coupling a wafer including MEMS devices to a test system and electrically coupling one of the MEMS devices through a probe card to a pulse measure unit (PMU) of the test system. The method includes driving, through the PMU, drive nodes of the MEMS device with an applied time-varying electrical signal to cause a resonance condition of the MEMS device, and sensing, through the PMU, an electrical signal generated across sense nodes of the MEMS device responsive to the resonance condition. A resonance frequency and quality factor of the MEMS device are determined based on the sensed electrical signals across the sense nodes of the MEMS device, and whether the MEMS device passes a quality factor test is made based on the calculated quality factor.