The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Aug. 30, 2024
Applicants:
Mitsubishi Chemical Corporation, Tokyo, JP;
Gelest, Inc., Morrisville, PA (US);
Inventor:
Yuta Hioki, Tokyo, JP;
Assignees:
MITSUBISHI CHEMICAL CORPORATION, Tokyo, JP;
GELEST, INC., Morrisville, PA (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07F 7/22 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
C07F 7/2224 (2013.01); C07F 7/2284 (2013.01); G03F 7/0042 (2013.01); G03F 7/0048 (2013.01); G03F 7/32 (2013.01);
Abstract
As a high-performance resist material that can have high purity and uniform solubility, the following tin compound is provided. The tin compound includes: a tin atom; an organic group R; and at least one of an oxo-ligand and a hydroxo-ligand, wherein the tin compound has a diffraction angle 2θ (°) of a peak with a strongest intensity between 5.00 to 15.00° in X-ray diffraction measurement, the strongest intensity peak has a half-value width of 1.00 to 4.00°, and the organic group R has 1 to 30 carbon atoms.