The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Dec. 07, 2023
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Johann Irnstetter, Heidenheim an der Brenz, DE;
Thomas Gebhard, Aalen, DE;
Marcel Vogt, Langenau, DE;
Andreas Daubenschüz, Drackenstein, DE;
Manuel Best, Niederstotzingen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An interchangeable-object holding apparatus for an EUV metrology system for holding and providing an interchangeable object, which is intended to be used interchangeably within the EUV metrology system. A calibration device serves for calibrating a relative position of the interchangeable object in the interchangeable-object holder with respect to a calibration object of the interchangeable-object holding apparatus. The calibration device has holder abutment bodies, secured to the interchangeable-object holder, and calibration-object counter-abutment bodies, secured to the calibration object. At least one contact sensor of the calibration device serves for detecting a contact between the respective holder abutment body and the respective calibration-object counter-abutment body. An evaluation unit serves for determining the relative position of the interchangeable object in the interchangeable-object holder with respect to the calibration object, enabling the interchangeable-object holder to be positioned relative to the calibration object with a specified level of accuracy and with less metrological complexity of the calibration device.