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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12699324 B1

PDFFull Text
Date of Patent:
Aug. 04, 2026

Filed:

Jan. 11, 2023

Substrate table, lithographic apparatus, sticker, cover ring and method of operating a lithographic apparatus

Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Gijs Kramer, Nijmegen, NL;

Christianus Wilhelmus Johannes Berendsen, Eindhoven, NL;

Stijn Van Pelt, Den Bosch, NL;

Marcus Martinus Petrus Adrianus Vermeulen, Leende, NL;

Simon Karel Ravensbergen, Veldhoven, NL;

Erik Willem Bogaart, Someren, NL;

Assignee:

ASML NETHERLANDS B.V., Veldhoven, NL;

Attorney:

Pillsbury Winthrop Shaw Pittman, LLP

Primary Examiner:

Mesfin T Asfaw

Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70341 (2013.01); G03F 7/70716 (2013.01);
Abstract

A substrate table, for use in an immersion lithographic apparatus, having a support area defining a support plane to support a substrate to be patterned and an upper surface surrounding the support area, wherein: the upper surface has an outer region that is substantially planar and a transition region proximate the support area; and the transition region is not co-planar with the outer region so as to ameliorate a level transition between the outer region and a non-standard substrate, which has a thickness different than a distance between the support plane and a nominal plane defined by the outer region.

Find Patent Forward Citations

Kramer, Gijs. (2026). Substrate table, lithographic apparatus, sticker, cover ring and method of operating a lithographic apparatus (U.S. Patent No. 12699324). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12699324

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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